<http://webisa.webdatacommons.org/216346417>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/216346417>	<http://www.w3.org/ns/prov#value>	"The system???s components will include a large high-vacuum chamber in which thin metal films will be deposited on a silicon chip or other substrate." .
<http://webisa.webdatacommons.org/prov/290280992>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/216346417> .
<http://webisa.webdatacommons.org/216346417>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<amherst.edu> .