<http://webisa.webdatacommons.org/prov/36029718>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/224344800> .
<http://webisa.webdatacommons.org/prov/360598878>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/224344800> .
<http://webisa.webdatacommons.org/224344800>	<http://www.w3.org/ns/prov#value>	"This has created new opportunities where the tools of semiconductor device manufacturing can be applied to fields other than electronics, such as biology and medicine." .
<http://webisa.webdatacommons.org/224344800>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<nist.gov> .
<http://webisa.webdatacommons.org/224344800>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .