<http://webisa.webdatacommons.org/225613233>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/225613233>	<http://www.w3.org/ns/prov#value>	"The material of the pad nitride layer 320 may comprise at least one of nitride, oxynitride, or other material that is adequate to provide desired protection or various combinations thereof." .
<http://webisa.webdatacommons.org/225613233>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/283706124>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/225613233> .