<http://webisa.webdatacommons.org/232857590>	<http://www.w3.org/ns/prov#value>	"The present invention pertains to sputter chambers and more specifically to sputter chambers having a cathode nested in spacers formed of a dielectric material such as the material sold under the trademark Teflon." .
<http://webisa.webdatacommons.org/prov/61168508>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/232857590> .
<http://webisa.webdatacommons.org/232857590>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/232857590>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .