<http://webisa.webdatacommons.org/235364317>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<docstoc.com> .
<http://webisa.webdatacommons.org/prov/424967088>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/235364317> .
<http://webisa.webdatacommons.org/235364317>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/235364317>	<http://www.w3.org/ns/prov#value>	"platform and its top connected to the concentric platform by means of circular bridge. The center of a SiO.sub.2 /SiN.sub.4 arch-like structure is connected to the piezo element. Valve seats are made of nickel or other sealing substance. In a" .