<http://webisa.webdatacommons.org/236668320>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/29516461>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/236668320> .
<http://webisa.webdatacommons.org/prov/299954980>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/236668320> .
<http://webisa.webdatacommons.org/236668320>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/236668320>	<http://www.w3.org/ns/prov#value>	"FIGS. 6A and B are a diagram for explaining the definition of an ion beam incident angle and a graph showing the relationship between the ion beam incident angle and the etching rate;" .