<http://webisa.webdatacommons.org/23751780>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/23751780>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/170971965>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/23751780> .
<http://webisa.webdatacommons.org/23751780>	<http://www.w3.org/ns/prov#value>	"wherein a penetrating hole is formed in one of the substrates, and at least one of the bent portions enters the penetrating hole, and wherein the one of the bent portions entering the penetrating hole is a part of the interconnect pattern formed on the substrate having the penetrating hole. 8." .