<http://webisa.webdatacommons.org/23760849>	<http://www.w3.org/ns/prov#value>	"A silicon diffusion preventing conductive layer or a barrier layer 4 made of refractory metal such as TiN and a lower electrode layer 5 made of noble metal such as Ru are formed on the polycrystalline silicon plug 3." .
<http://webisa.webdatacommons.org/23760849>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/466869962>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/23760849> .
<http://webisa.webdatacommons.org/23760849>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .