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<http://webisa.webdatacommons.org/238930324>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/238930324>	<http://www.w3.org/ns/prov#value>	"FIGS. 5A and 5B are a flow chart illustrating a method of heating the substrate support of FIG. 2 according to the invention." .
<http://webisa.webdatacommons.org/238930324>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/465046784>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/238930324> .