<http://webisa.webdatacommons.org/243393479>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/243393479>	<http://www.w3.org/ns/prov#value>	"Sputtering is a process whereby small particles, for example atoms, are ejected from a solid target material due to bombardment of the target by energetic particles, for example ions." .
<http://webisa.webdatacommons.org/prov/460163991>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/243393479> .
<http://webisa.webdatacommons.org/243393479>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .