<http://webisa.webdatacommons.org/prov/462523969>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/246619106> .
<http://webisa.webdatacommons.org/246619106>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patentgenius.com> .
<http://webisa.webdatacommons.org/246619106>	<http://www.w3.org/ns/prov#value>	"The dielectric layer 314 may comprise materials such as silicon oxide, silicon nitride, silicon oxynitride, or combinations thereof." .
<http://webisa.webdatacommons.org/prov/283706122>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/246619106> .
<http://webisa.webdatacommons.org/prov/45356705>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/246619106> .
<http://webisa.webdatacommons.org/246619106>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .