<http://webisa.webdatacommons.org/246885383>	<http://www.w3.org/ns/prov#value>	"The side walls 8a and 8b are not limited for the material, and use of a metal such as stainless steel or aluminum is preferable in view of the strength and heat resistance as well as the localized plasma generation." .
<http://webisa.webdatacommons.org/prov/294561051>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/246885383> .
<http://webisa.webdatacommons.org/246885383>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/246885383>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freshpatents.com> .
<http://webisa.webdatacommons.org/prov/62320232>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/246885383> .