<http://webisa.webdatacommons.org/253028435> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/253028435> <http://www.w3.org/ns/prov#value> "It is pointed out that, in industries such as microelectronics, certain operations such as the preparation of silicon wafers or chips must be performed in an atmosphere which is free from impurities or dust i.e., in so-called white rooms." . <http://webisa.webdatacommons.org/253028435> <http://www.w3.org/ns/prov#wasQuotedFrom> <google.com> . <http://webisa.webdatacommons.org/prov/329375015> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/253028435> .