<http://webisa.webdatacommons.org/256198636>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/463791437>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/256198636> .
<http://webisa.webdatacommons.org/256198636>	<http://www.w3.org/ns/prov#value>	"FIGS. 4A and 4B are a cross sectional view and a top view of a vapor deposition system according to the present invention (Embodiment Mode 3);" .
<http://webisa.webdatacommons.org/256198636>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .