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<http://webisa.webdatacommons.org/25771403>	<http://www.w3.org/ns/prov#value>	" infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulatorUS5961848Nov 10, 1995Oct 5, 1999Thomson-CsfProcess for producing magnetoresistive transducersUS6028689Jan 24, 1997Feb 22, 2000The United States Of America As Represented By The Secretary Of The Air ForceMulti-motion micromirrorUS6031653" .