<http://webisa.webdatacommons.org/258324868>	<http://www.w3.org/ns/prov#value>	"FIG. 21A is a side view of an alternative embodiment of a nozzle depositing reactants in a reaction zone near a substrate surface." .
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<http://webisa.webdatacommons.org/258324868>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/248330635>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/258324868> .