<http://webisa.webdatacommons.org/prov/250249874>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/259629557> .
<http://webisa.webdatacommons.org/259629557>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/259629557>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/259629557>	<http://www.w3.org/ns/prov#value>	"FIG. 13A is a plan view showing, as continued from FIG. 12A, the method of manufacturing a semiconductor device according to the second embodiment;" .