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<http://webisa.webdatacommons.org/259678894>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/259678894>	<http://www.w3.org/ns/prov#value>	"FIG. 21A is a plan view showing an example of a photomask used in the fabrication process of the semiconductor integrated circuit device in FIG. 1." .
<http://webisa.webdatacommons.org/prov/245850497>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/259678894> .