. . "FIG. 13A is a plan view showing one of the main steps of manufacturing a nonvolatile semiconductor memory according to the embodiment of the present invention, FIG. 13B is a sectional view taken along the line 13B-13B in FIG. 13A, FIG. 13C is a sectional view taken along the line 13C-13C in FIG. 13A, FIG. 13D is a sectional view taken along the line 13D-13D in FIG. 13A, and FIG. 13E is a sectional" . .