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<http://webisa.webdatacommons.org/261029812>	<http://www.w3.org/ns/prov#value>	"of some other material, for example silicon dioxide, can be formed on top of the semiconductor layer stack, with bottom antireflective coating (BARC) on top, then patterned and etched. Similarly, dielectric antireflective coating (DARC) can be used as a" .
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