<http://webisa.webdatacommons.org/265276129>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/507604917>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/265276129> .
<http://webisa.webdatacommons.org/265276129>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/265276129>	<http://www.w3.org/ns/prov#value>	"nsisting of the function -KEp or the function -K?????(Ei/Si2)/??(1/Si2) where K is a coefficient and the first-mentioned function is selected where a maxima or a minima exists between the ends of a edge and the second mentioned function is selected where the distance values exhibit an inclination relative to the edge; and correcting each edge position of said exposure pattern according to an outpu" .