<http://webisa.webdatacommons.org/266209909>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/266209909>	<http://www.w3.org/ns/prov#value>	"In one of its aspects, the invention is a method for depositing on a substrate a metal oxide coating which reflects light diffusely, which comprises subjecting said substrate to alternating feed pulses of a hydrolyzable chloride of said metal and of water at pressures in the range of about 180-1250 and about 150-650 millitorr respectively, with evacuation of the deposition system to a pressure in" .
<http://webisa.webdatacommons.org/prov/396501558>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/266209909> .
<http://webisa.webdatacommons.org/266209909>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/137300573>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/266209909> .