<http://webisa.webdatacommons.org/prov/8877839>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/269083367> .
<http://webisa.webdatacommons.org/269083367>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/269083367>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/269083367>	<http://www.w3.org/ns/prov#value>	"In this case, the evaporation is a mask evaporation, or the pattern is formed by photoetching techniques after evaporation." .