<http://webisa.webdatacommons.org/prov/31864680>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/269327623> .
<http://webisa.webdatacommons.org/269327623>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/269327623>	<http://www.w3.org/ns/prov#value>	"An alternative process for depositing a silicon dioxide or other insulating layer uses a chemical-vapor deposition process." .
<http://webisa.webdatacommons.org/269327623>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .