<http://webisa.webdatacommons.org/270161025>	<http://www.w3.org/ns/prov#value>	"In FIG. 1A, a substrate 1 is a member for supporting an X-ray transmissive film, and is usually an Si wafer." .
<http://webisa.webdatacommons.org/270161025>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/134795355>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/270161025> .
<http://webisa.webdatacommons.org/270161025>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .