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<http://webisa.webdatacommons.org/273441774>	<http://www.w3.org/ns/prov#value>	"where k is a coefficient, and ?? is a value calculated from the configuration of the optical system in the apparatus for inspecting particles and defects of the present invention." .
<http://webisa.webdatacommons.org/prov/507604917>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/273441774> .
<http://webisa.webdatacommons.org/273441774>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .