<http://webisa.webdatacommons.org/prov/34780485>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/276924667> .
<http://webisa.webdatacommons.org/276924667>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/276924667>	<http://www.w3.org/ns/prov#value>	"The polycrystalline silicon film 5 can be formed, for example, by CVD. FIG. 3 is a graph diagrammatically showing the impurity concentration distribution, in the thickness direction (a direction" .
<http://webisa.webdatacommons.org/276924667>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .