<http://webisa.webdatacommons.org/prov/141527331>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/278082529> .
<http://webisa.webdatacommons.org/prov/141651779>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/278082529> .
<http://webisa.webdatacommons.org/278082529>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/278082529>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/278082529>	<http://www.w3.org/ns/prov#value>	"A data line assembly is formed on the ohmic contact patterns 155, 156 and 158 with a conductive material such as Mo or MoW alloy, Cr, Al or Al alloy, and Ta." .