<http://webisa.webdatacommons.org/prov/122776852>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/278908443> .
<http://webisa.webdatacommons.org/278908443>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/278908443>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/363606097>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/278908443> .
<http://webisa.webdatacommons.org/278908443>	<http://www.w3.org/ns/prov#value>	"After the apertures are formed, the apertures are filled with a conductive material, such as tungsten, titanium, copper, aluminum or other metal to form conductive vias 64 and 65." .
<http://webisa.webdatacommons.org/prov/358765996>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/278908443> .