<http://webisa.webdatacommons.org/282421444>	<http://www.w3.org/ns/prov#value>	"A substrate, such as a silicon wafer or a carrier substrate is provided." .
<http://webisa.webdatacommons.org/282421444>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/337963166>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/282421444> .
<http://webisa.webdatacommons.org/prov/353356797>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/282421444> .
<http://webisa.webdatacommons.org/282421444>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .