<http://webisa.webdatacommons.org/282507442>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .
<http://webisa.webdatacommons.org/prov/331586024>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/282507442> .
<http://webisa.webdatacommons.org/282507442>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/282507442>	<http://www.w3.org/ns/prov#value>	"substrate, an insulating material such as SiO is buried so as to form an" .