<http://webisa.webdatacommons.org/283759516>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
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<http://webisa.webdatacommons.org/283759516>	<http://www.w3.org/ns/prov#value>	"The support member 185 can include a removable top plate 190 made of some other material, such as silicon or ceramic material, for example, to reduce backside contamination of the substrate." .
<http://webisa.webdatacommons.org/prov/45356710>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/283759516> .