<http://webisa.webdatacommons.org/292100782>	<http://www.w3.org/ns/prov#value>	"In various embodiments, a hafnium silicon oxynitride film may be doped with elements or compounds other than hafnium, silicon, oxygen, and nitrogen." .
<http://webisa.webdatacommons.org/prov/48623389>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/292100782> .
<http://webisa.webdatacommons.org/prov/429596982>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/292100782> .
<http://webisa.webdatacommons.org/292100782>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/292100782>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .