<http://webisa.webdatacommons.org/292329501>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/292329501>	<http://www.w3.org/ns/prov#value>	"In this embodiment, separate material delivery systems are required for the two different materials, however only one waste collection system is needed since the waste is a combination of both materials collected after planarizing." .
<http://webisa.webdatacommons.org/prov/207481986>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/292329501> .
<http://webisa.webdatacommons.org/292329501>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .