<http://webisa.webdatacommons.org/prov/270972903>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/293395348> .
<http://webisa.webdatacommons.org/293395348>	<http://www.w3.org/ns/prov#value>	"PROCESS CHAMBER An enclosed area in which a single process is performed in the manufacture of an integrated circuit or other device." .
<http://webisa.webdatacommons.org/293395348>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<appliedmaterials.com> .
<http://webisa.webdatacommons.org/293395348>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .