<http://webisa.webdatacommons.org/293632352>	<http://www.w3.org/ns/prov#value>	"In addition to or instead of the vacuum, the rotary chuck 210 may include another connector, such as a mechanical connector, for example, a clamp or other means mechanically gripping the edge portion of the wafer W." .
<http://webisa.webdatacommons.org/prov/367532984>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/293632352> .
<http://webisa.webdatacommons.org/prov/37971308>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/293632352> .
<http://webisa.webdatacommons.org/293632352>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/293632352>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .