<http://webisa.webdatacommons.org/293983551>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/464216628>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/293983551> .
<http://webisa.webdatacommons.org/293983551>	<http://www.w3.org/ns/prov#value>	"A resist composition according to claim 1, wherein the component (c) is a compound of the formula: ##STR27## wherein R7 is a straight-chain, branched or cyclic alkyl group having 1 to 10 carbon atoms, a trifluoromethyl group, a phenyl group or a tolyl group; R8 and R9 are independently a hydrogen atom or a straight-chain, or branched alkyl group having 1 to 5 carbon atoms; and R10 is a straight-ch" .
<http://webisa.webdatacommons.org/293983551>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .