<http://webisa.webdatacommons.org/295876485>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
<http://webisa.webdatacommons.org/prov/241440997>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/295876485> .
<http://webisa.webdatacommons.org/prov/251568901>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/295876485> .
<http://webisa.webdatacommons.org/prov/241300400>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/295876485> .
<http://webisa.webdatacommons.org/295876485>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/246245872>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/295876485> .
<http://webisa.webdatacommons.org/295876485>	<http://www.w3.org/ns/prov#value>	"FIGS. 16A and 16B are a top view and a perspective view, respectively, of a MEMS variable capacitor having a shielding according to an embodiment of the subject matter described herein;" .