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<http://webisa.webdatacommons.org/296156447>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/296156447>	<http://www.w3.org/ns/prov#value>	"For performing the bonding step, a surface of the first substrate 101 and a surface of the bonding layer 107, where a bonding interface is formed, are washed by a method such as ultrasonic cleaning." .
<http://webisa.webdatacommons.org/296156447>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .