<http://webisa.webdatacommons.org/30180291>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/30180291>	<http://www.w3.org/ns/prov#value>	"FIGS. 7A and 7B are a partial plan view and the cross-sectional view thereof, respectively, for illustrating a step in a thin-film processing method in a first example according to the invention." .
<http://webisa.webdatacommons.org/prov/450406843>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/30180291> .
<http://webisa.webdatacommons.org/30180291>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/450423561>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/30180291> .