<http://webisa.webdatacommons.org/302020691>	<http://www.w3.org/ns/prov#value>	"The present invention provides an efficient method for manufacturing a semiconductor device, in which a laser beam is used to dice a substrate having semiconductor layers formed thereon, with gallium contained in at least one of the substrate and the semiconductor layers, and is particularly suitable as a method for manufacturing light-emitting elements that utilizes sapphire and gallium compound" .
<http://webisa.webdatacommons.org/302020691>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/420534330>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/302020691> .
<http://webisa.webdatacommons.org/prov/123423958>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/302020691> .
<http://webisa.webdatacommons.org/302020691>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .