. "The material for the object to be polished includes, for instance, metals or metalloids such as silicon, aluminum, nickel, tungsten, copper tantalum, and titanium; alloys made of these metals as the main components; glassy substances such as glass, glassy carbon and amorphous carbons; ceramic materials such as alumina, titanium carbide, silicon dioxide, silicon nitride, tantalum nitride, and titan" . . . . .