<http://webisa.webdatacommons.org/305767475> <http://www.w3.org/ns/prov#value> "The gas (atmosphere) may be switched from nitrogen or an inert gas such as a rare gas (e.g., argon or helium) to oxygen, both oxygen and nitrogen, or the air (having a dew point of preferably lower than or equal to ???40??? C., still preferably lower than or equal to ???50??? C.) at any of the following timings: at the time when the temperature of the oxide semiconductor layer is in a constant sta" . <http://webisa.webdatacommons.org/305767475> <http://www.w3.org/ns/prov#wasQuotedFrom> <google.de> . <http://webisa.webdatacommons.org/prov/99851520> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/305767475> . <http://webisa.webdatacommons.org/305767475> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/prov/298093982> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/305767475> . <http://webisa.webdatacommons.org/prov/404614570> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/305767475> . <http://webisa.webdatacommons.org/prov/324463257> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/305767475> .