<http://webisa.webdatacommons.org/prov/304621121>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/308684383> .
<http://webisa.webdatacommons.org/308684383>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .
<http://webisa.webdatacommons.org/308684383>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/308684383>	<http://www.w3.org/ns/prov#value>	"[0003] In semiconductor devices, such as LSIs, various isolation" .