<http://webisa.webdatacommons.org/313624390>	<http://www.w3.org/ns/prov#value>	"A suitable anti-reflective coating 86 includes, but is not limited to, single-layer coatings such as silicon" .
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<http://webisa.webdatacommons.org/313624390>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .
<http://webisa.webdatacommons.org/prov/56557855>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/313624390> .