<http://webisa.webdatacommons.org/313843274>	<http://www.w3.org/ns/prov#value>	"In one embodiment, substrate 1700, substrate 2700, or other substrates may be exposed to at least one annealing process during steps 1140, 1230, 1360, 1450, 1530, 1630, 2630, or 2860." .
<http://webisa.webdatacommons.org/prov/193259659>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/313843274> .
<http://webisa.webdatacommons.org/313843274>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.co.uk> .
<http://webisa.webdatacommons.org/313843274>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .