<http://webisa.webdatacommons.org/prov/324720660>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/314021710> .
<http://webisa.webdatacommons.org/314021710>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/314021710>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/324463257>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/314021710> .
<http://webisa.webdatacommons.org/314021710>	<http://www.w3.org/ns/prov#value>	"In addition, the first and second etch chemistries may include an inert gas such as argon and xenon." .