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<http://webisa.webdatacommons.org/prov/233731919>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/314177651> .
<http://webisa.webdatacommons.org/314177651>	<http://www.w3.org/ns/prov#value>	"Further, a metal compound thereof such as TiN may be used for forming the barrier layer 49." .
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<http://webisa.webdatacommons.org/314177651>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .