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<http://webisa.webdatacommons.org/321003083>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/321003083>	<http://www.w3.org/ns/prov#value>	"ions of said plurality of portions; control means for moving said tip with respect to said surface; and feedback means including said control means responsive to said electrical signals generated in response to said respective deflections of said plurality of portions of said piezoelectric film strain sensor for controlling the movement of said tip. 10." .
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