<http://webisa.webdatacommons.org/323314685>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/323314685>	<http://www.w3.org/ns/prov#value>	"The conductive contact plugs 212 can be formed of electrically conductive materials including but not limited to metal, metal compound, metal alloy, doped polysilicon, or polycides." .
<http://webisa.webdatacommons.org/prov/291895256>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/323314685> .
<http://webisa.webdatacommons.org/323314685>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .